Special screws SEMICONDUCTOR INDUSTRY

Special Screws for Vacuum Environments in the Semiconductor Industry

Precision, purity and reliability for critical processes
In semiconductor manufacturing, even microscopic particles or residual gases can compromise the final product. Vacuum environments are therefore essential, and every component used must meet stringent performance and cleanliness standards. Special attention must be given to fasteners, particularly screws.

Why are screws critical in vacuum systems?
Standard screws can trap air or gases between threads or inside blind holes. Under vacuum, these gases are gradually released (outgassing), contaminating the chamber and potentially disrupting critical processes such as lithography, etching, or deposition.

NBK Vented Screws: specifically engineered for vacuum
NBK’s vented screws are designed to prevent gas retention and ensure reliable operation in vacuum chambers. Key features include:

Through-hole ventilation design: allows trapped gases to escape, minimising outgassing.
Low-outgassing materials: such as SUS316L stainless steel, known for corrosion resistance and high purity.
Cleanroom washing and packaging: ensuring the screws are ready for use in ultra-clean environments.

Key benefits for semiconductor manufacturing

Shorter chamber pump-down times.
Minimised risk of contamination from residual gases or particles.
Reliable performance under high vacuum and UHV conditions.
Compatibility with critical processes, including E-beam deposition, RIE, and advanced lithography.

Typical applications

Lithography and deposition tools.
Vacuum analysis chambers.
Wafer handling systems.
Precision metrology equipment.

EXAMPLE VACUUM CHAMBER
Plasma CVD equipment

As a trusted manufacturer of fastening solutions for special environments, NBK delivers consistent quality and performance. Its range of vented screws is a key component in the success of world-leading semiconductor manufacturers.

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